| 掺铝氧化锌薄膜表面织构机制的研究 |
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| 引用本文： | 郜小勇,林清耿,冯红亮,陈永生,杨仕娥,谷锦华,卢景霄. 掺铝氧化锌薄膜表面织构机制的研究[J]. 功能材料, 2009, 40(10) |
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| 作者姓名： | 郜小勇 林清耿 冯红亮 陈永生 杨仕娥 谷锦华 卢景霄 |
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| 作者单位： | 郑州大学,物理工程学院,材料物理教育部重点实验室,河南,郑州,450052;郑州大学,物理工程学院,材料物理教育部重点实验室,河南,郑州,450052;郑州大学,物理工程学院,材料物理教育部重点实验室,河南,郑州,450052;郑州大学,物理工程学院,材料物理教育部重点实验室,河南,郑州,450052;郑州大学,物理工程学院,材料物理教育部重点实验室,河南,郑州,450052;郑州大学,物理工程学院,材料物理教育部重点实验室,河南,郑州,450052;郑州大学,物理工程学院,材料物理教育部重点实验室,河南,郑州,450052 |
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| 基金项目： | 国家自然科学基金资助项目(60807001) |
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| 摘 要： | 采用氯化铵(NH4Cl)溶液对磁控溅射技术制备的掺铝氧化锌(AZO)薄膜进行表面织构,并对其表面织构机制进行研究.研究结果表明NH4Cl溶液优先与间隙锌、间隙铝等缺陷和晶界处的堆积铝反应,而较大的相对应力和稀疏表面有助于间隙锌、间隙铝等缺陷和堆积铝的形成.它们对NH4Cl对AZO薄膜的表面织构很关键.
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| 关 键 词： | 氯化铵 掺铝氧化锌薄膜 表面织构 |
Study on the surface texture mechanism of Al-doped zinc oxide films etched by NH_4Cl aqueous solution |
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| GAO Xiao-yong,LIN Qing-geng,FENG Hong-liang,CHEN Yong-sheng,YANG Shi-e,GU Jin-hua,LU Jing-xiao. Study on the surface texture mechanism of Al-doped zinc oxide films etched by NH_4Cl aqueous solution[J]. Journal of Functional Materials, 2009, 40(10) |
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| Authors: | GAO Xiao-yong LIN Qing-geng FENG Hong-liang CHEN Yong-sheng YANG Shi-e GU Jin-hua LU Jing-xiao |
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| Affiliation: | GAO Xiao-yong,LIN Qing-geng,FENG Hong-liang,CHEN Yong-sheng,YANG Shi-e,GU Jin-hua,LU Jing-xiao(The Key Laboratory of Material Physics of Ministry of Education,School of Physics and Engineering,Zhengzhou University,Zhengzhou 450052,China) |
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| Abstract: | The as-deposited Al-doped zinc oxide(AZO) transparent and conductive films by magnetron sputtering technique were textured by NH4Cl aqueous solution and the surface texture mechanism of AZO films was investigated.The results indicated that NH4Cl aqueous solution may firstly react with interstitial Zn,interstitial Al and stacked Al at the grain boundary,which was easily induced by a relative large film stress and smaller film compactness.The formation of interstitial Zn,interstitial Al and the grain boundary... |
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| Keywords: | NH4Cl aqueous solution AZO film surface texture |
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