Robust control of the electrostatic torsional micromirrors

In order to simplify the sensors subsystems of the electrostatic torsional micromirrors (ETMs), the output feedback control for the ETM systems is investigated in this paper. The dynamics of the systems is established by combining the dynamics of both the mechanical and electronic subsystems, and it is proved that the dynamics of the overall system with uncertainties in electrical parameters can be exactly transformed into the third order linear system. Then an output feedback finite-time stabilizing (FTS) controller is presented by composing of a full state FTS observer and a state feedback FTS controller for the third order linear systems, such that the ETM systems can be stabilized in its full travel range by merely measuring the tilt angle. Some numerical simulations demonstrate the stability of the proposed output feedback FTS controller.