Nano- and micrometrology at PTB: State of the art and future challenges |
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| Authors: | H. Bosse L. Koenders F. Härtig E. Buhr G. Wilkening |
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| Affiliation: | 1. National Metrology Institute of Germany (PTB), Bundesallee 100, 38116, Braunschweig, Germany
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| Abstract: | In this paper we will provide an overview of methods and instruments developed and applied at the National Metrology Institute of Germany (Physikalisch Technische Bundesanstalt—PTB) for high-precision dimensional (linear and angular) measurements and discuss some challenges for future developments in this important area of metrology. |
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