An integrated piezoelectric-insulator DMOST surface-acoustic-wave convolver

A detailed investigation and analysis of a new device, the PI-DMOST convolver, is presented. The feasibility of this type of convolver has been previously demonstrated 1]. In this paper, we present the experimental results of another configuration of the device, fabricated with a new process. The theory is presented in detail for operation of the convolver using first-order Rayleigh-mode waves, and then extended to include other SAW modes.The convolver measures 100 μm by 1 cm, has a dynamic range of 70 dB, and is realized using ZnO piezoelectric films on a planar-processed silicon wafer.