| 一种Nanometrics膜厚测试仪精密度评价方法 |
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| 引用本文： | 唐昭焕,徐岚,刘勇,税国华.一种Nanometrics膜厚测试仪精密度评价方法[J].微电子学,2010,40(1). |
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| 作者姓名： | 唐昭焕 徐岚 刘勇 税国华 |
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| 作者单位： | 1. 中国电子科技集团公司,第二十四研究所
2. 中国电子科技集团公司,第二十四研究所;模拟集成电路国家级重点实验室,重庆,400060 |
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| 摘 要： | 通过采用PPM、SPC软件和数理统计方法对样本进行处理的方式,对一种Nanometrics膜厚测试仪精密度的评价方法进行研究。讨论了样本在数据收集、分析、处理过程中的难点,得到Nanometrics膜厚测试仪精密度为1.25%的结论;找到了一种适合该膜厚测试仪精密度的评价方法。
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| 关 键 词： | 膜厚测试仪 数理统计 SPC 半导体工艺 |
Precision Evaluation Method for Nanometrics Measurement System |
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| TANG Zhaohuan,XU Lan,LIU Yong,SHUI Guohua.Precision Evaluation Method for Nanometrics Measurement System[J].Microelectronics,2010,40(1). |
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| Authors: | TANG Zhaohuan XU Lan LIU Yong SHUI Guohua |
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| Affiliation: | 1. Sichuan Institute of Solid State Circuits/a>;CETC/a>;Chongqing 400060/a>;P.R.China/a>;2.National Lab of Analog IC's/a>;P.R.China |
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| Abstract: | Precision evaluation method for Nanometrics measurement system was studied by using PPM,SPC and mathematical statistics method to analyze and process samples.Difficulties in data collecting,analyzing and processing were discussed,and the accuracy of the Nanometrics measurement system was calculated to be 1.25%.A precision evaluation method suitable for film thickness measurement system was presented. |
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| Keywords: | Film thickness measurement system Mathematical statistics SPC Semiconductor process |
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