面向激光防护应用的金刚石/V2O5 膜系设计与制备

针对目前激光对红外光电传感器的威胁,为满足红外传感器在可见光与3~5 m波段高透射,低于3 m波段高反射的使用要求,采用光学金刚石作为红外窗口材料,采用具有热致相变特性的V2O5薄膜作为激光防护涂层,采用ZnS和YbF3作为高低折射率材料,依据膜系设计理论设计具有抗激光致盲能力的红外增透膜并采用TFCalc优化膜系。采用离子辅助法制备增透膜,采用磁控溅射法在实验制备增透膜上制备V2O5涂层。采用扫描探针显微镜对光学薄膜的表面三维形貌及粗糙度进行测试分析,对薄膜进行红外光谱测试分析,结果满足使用设计要求。

Design and fabrication of diamond/V2O5 films in continuous laser protection

In order to satisfy the requirements of infrared detector that can penetrate in visible and 3-5 m double wave bands, be reflected in 3 m wave band, optical diamond was selected as infrared window material to protect infrared detector from laser beams. V2O5 film with thermally induced phase transition properties was selected as anti-laser blinding coating. ZnS and YbF3 were chosen as high and low index of refraction materials respectively. Infrared anti-reflective coating applied on laser protection was designed based on design theory of films and optimized by TFCalc. Anti-reflective coatings were fabricated by ion assisted deposition and V2O5 coating was fabricated on anti-reflective coatings by using the method of magnetron sputtering. The surface topography and roughness of optical thin film were tested by scanning probe microscope and the infrared spectra was tested and analyzed. The results meet the requirements of design and application.