| 圆形压电单晶片驱动式主动阀泵实验 |
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| 引用本文： | 程光明,何丽鹏,曾平,李慧茹,阚君武,杨志刚. 圆形压电单晶片驱动式主动阀泵实验[J]. 纳米技术与精密工程, 2010, 8(2): 183-188 |
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| 作者姓名： | 程光明 何丽鹏 曾平 李慧茹 阚君武 杨志刚 |
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| 作者单位： | 1. 吉林大学机械科学与工程学院,长春,130025
2. 吉林大学机械科学与工程学院,长春,130025;长春大学机械科学与工程学院,长春,130025 |
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| 基金项目： | 国家自然科学基金资助项目(50575093,50775093) |
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| 摘 要： | 为解决微泵截止性低和回流等问题,利用有限元分析法,建立了微小型圆形压电单晶片驱动式主动阀的结构数学模型,分析了阀口厚度和阀口间隙对阀腔内流场分布和压强损耗的影响,为优化圆形单晶片驱动式微小型主动阀泵的结构提供了依据.并且利用自身设计制作的圆形单晶片驱动式微小型主动阀压电泵（直径35mm）进行了分析验证.结果表明,在阀口厚度一定时,随着电压的升高,压电振子的振幅增大,主动阀的截止性升高,回流减少,流量升高.当阀口厚度为200μm、阀口间隙为30μm、电压为150V时,其流量达到38mL/min.
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| 关 键 词： | 微泵 有限元分析 阀口厚度 阀口间隙 流量 |
Experiment on Circular Piezoelectric-Driven Unimorph Pump with Active Valve |
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| CHENG Guang-ming,HE Li-peng,ZENG Ping,LI Hui-ru,KAN Jun-wu,YANG Zhi-gang. Experiment on Circular Piezoelectric-Driven Unimorph Pump with Active Valve[J]. Nanotechnology and Precision Engineering, 2010, 8(2): 183-188 |
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| Authors: | CHENG Guang-ming HE Li-peng ZENG Ping LI Hui-ru KAN Jun-wu YANG Zhi-gang |
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| Affiliation: | 1.School of Mechanical Science and Engineering/a>;Jilin University/a>;Changchun 130025/a>;China/a>;2.School of Mechanical Science and Engineering/a>;Changchun University/a>;China |
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| Abstract: | In order to resolve low cut-off and back flow of the micropump,finite element analysis was used to set up the mathematical model of a circular piezoelectric-driven unimorph micropump structure with active valve and analyze the influence of the valve port thickness and valve port gap on cavity flow field distribution and the pressure loss,providing the basis of the structure to optimize circular piezoelectric-driven unimorph micropump with active valve.Moreover,micro valve piezoelectric pump(diameter of 35 m... |
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| Keywords: | micropump finite element analysis valve port thickness valve port gap flux |
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