| 电磁驱动柔性振动膜无阀微泵 |
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| 引用本文： | 苏宇锋,陈文元,崔峰.电磁驱动柔性振动膜无阀微泵[J].微细加工技术,2003(4):60-64. |
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| 作者姓名： | 苏宇锋 陈文元 崔峰 |
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| 作者单位： | 上海交通大学微米纳米技术研究院薄膜与微细技术教育部重点实验室,微米纳米加工技术国家级重点实验室,上海,200030 |
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| 摘 要： | 提出了一种新型微泵设计方案和制作工艺，将电磁驱动器与大振幅振动膜相结合，得到流量大、易于控制的新型微泵。该微泵结构简单，由硅橡胶(聚二甲基硅氧烷PDMS橡胶)振动膜和无阀泵泵体组成，将硅加工工艺和非硅加工工艺(电镀)相结合。采用电镀和硅橡胶加工方法将振动膜直接制作在一个硅片上；用电镀和体硅加工工艺将驱动线圈和无阀泵泵体制作在另一块硅片上，然后将两个硅片键合在一起。对该微泵的性能特点正进行着更深入的研究。
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| 关 键 词： | 电磁驱动 柔性振动膜 无阀微泵 硅橡胶 电镀 体硅 |
| 文章编号： | 1003-8213(2003)04-0060-05 |
| 修稿时间： | 2003年7月4日 |
An Electro-magnetically Actuated Valveless Micropump with Flexible Diaphragm |
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| SU Yu-feng,CHEN Wen-yuan,CUI Feng.An Electro-magnetically Actuated Valveless Micropump with Flexible Diaphragm[J].Microfabrication Technology,2003(4):60-64. |
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| Authors: | SU Yu-feng CHEN Wen-yuan CUI Feng |
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| Abstract: | Design and fabrication process for a novel electro-magnetically actuated micropump is described, combining an electro-magnetically actuator with a large-displacement diaphragm to obtain the novel micropump with big flow and easy control. The micropump has simple construction and consists of a silicone rubber(PDMS rubber) diaphragm and a valveless pump body,which are fabricated with the silicon micromachining and nonsilicon micromaching(electroplating) techniques.The vibrating diaphragm is directly made on one silicon wafer by electroplating and sillicone rubber processing and the actuating coils and valveless pump body are made on another silicon wafer by electroplating and bulk silicon processing,then the two wafers are bonded together.The performances of the micropump is being deeply studied. |
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| Keywords: | electro-magnetically actuated micropump valveless pump silicone rubber |
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