MPECVD法在抛光石英玻璃上沉积金刚石薄膜

采用微波等离子体增强化学气相沉积方法(MPECVD),利用氢气和甲烷混合气体,在抛光石英基片上低温沉积出金刚石薄膜。用扫描电子显微镜(SEM)、激光拉曼光谱仪(Raman)和傅立叶红外光谱仪(FTIR)对薄膜的表面形貌、颗粒尺寸、纯度和光学透过性能进行了表征。通过SEM发现,得到的金刚石薄膜的颗粒尺寸为0.2~0.3μm,形核密度超过109cm-2,从薄膜形貌可以发现,较高温度有利于提高薄膜的生长速率和颗粒尺寸的均匀性。通过拉曼光谱和红外透射光谱分析发现,较高温度下沉积的薄膜具有较高的金刚石相含量,薄膜的光学透过性能也相对较好。

Preparation of Diamond Films on Quartz Glass by MPECVD

Diamond thin films were grown on polished quartz glass by using methane and hydrogen as reactant by the method of microwave plasma-enhanced chemical vapor deposition(MPECVD).Scanning electron microscopy(SEM),Raman spectroscopy analysis(Raman) and Fourier transform infrared spectrometer(FTIR) were used to characterize the surface morphology,grain size,purity and the optical transmittance of deposited films.The SEM images show that the grain size of diamond films are 0.2～0.3 μm,and the nucleation density is larger than 10~9 cm~(-2).The results indicate that higher growth temperature is better to improve the deposition rate and make grain size more uniform.The analysis of Raman spectroscopy and FTIR images shows that higher deposition temperature can improve the content of diamond phase,and thereby enhance the optical transmittance of the prepared films.