Affiliation: | 1. Center MicroElectroMechanical Systems (CMEMS), Universidade do Minho, Azurém, 4800‐058, Guimar?es, (Portugal);2. Department of Engenharia Mecanica, Universidade do Minho, Azurém, 4800‐058 Guimar?es, Portugal;3. Department of Materials and Ceramic Engineering, CICECO, University of Aveiro, 3810‐193 Aveiro, Portugal |