| 基于谐振原理的硅微机械加速度计 |
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| 引用本文： | 贾玉斌,郝一龙,钟莹,张嵘.基于谐振原理的硅微机械加速度计[J].微纳电子技术,2003(Z1). |
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| 作者姓名： | 贾玉斌 郝一龙 钟莹 张嵘 |
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| 作者单位： | 北京大学微电子学研究所 北京100871
(贾玉斌，郝一龙)，天津大学精仪学院 天津300072
(钟莹)，清华大学精仪系 北京100084(张嵘) |
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| 摘 要： | 基于力学振动原理 ,导出敏感梁类谐振振动的微分方程 ,给出了振梁型加速度计的设计原理。指出了加速度计谐振梁频率的相对变化量与梁的厚度无关 ;为避免输出非线性频率信号 ,频率的相对变化率和激励振动的振幅都不宜太大
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| 关 键 词： | 加速度计 类谐振器 非线性 |
Micromachined accelerometer based on resonant principle |
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| JIA Yu bin ,HAO Yi long ,ZHONG Ying ,ZHANG Rong.Micromachined accelerometer based on resonant principle[J].Micronanoelectronic Technology,2003(Z1). |
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| Authors: | JIA Yu bin HAO Yi long ZHONG Ying ZHANG Rong |
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| Affiliation: | JIA Yu bin 1,HAO Yi long 1,ZHONG Ying 2,ZHANG Rong 3 |
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| Abstract: | Based on Mechanics of vibration, the quasi resonant differential equation of sense beam is derived, and the design principle is given for the vibrating beam type accelerometer. It is shown that the frequency change rate is independent of the width of the vibrating beam, and the frequency change rate and the deflected beam amplitude must be small in order to avoid non linear behaviour. |
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| Keywords: | accelerometer quasi resonant oscillator non linearity |
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