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理想绝缘金属基板前处理工艺的研究
引用本文:朱继满,刘豫东,马莒生.理想绝缘金属基板前处理工艺的研究[J].功能材料与器件学报,2003,9(1):95-99.
作者姓名:朱继满  刘豫东  马莒生
作者单位:清华大学材料科学与工程系,北京,100083
基金项目:国家自然科学基金项目(No.69836030)
摘    要:采用阳极氧化工艺制备理想绝缘金属基板阳极氧化绝缘层。利用激光干涉法测量阳极氧化膜层在热冲击过程中的开裂温度。研究了铝板表面不同前处理工艺对金属基板绝缘层热开裂温度的影响,利用扫描电子显微镜(SEM)观察裂纹萌生的位置,结果表明阳极氧化前铝表面微观不平将使阳极氧化膜中产生一种孔隙率高的界面,热冲击过程中这种界面上容易萌生裂纹。

关 键 词:绝缘金属基板    阳极氧化膜  抗热冲击性能
文章编号:1007-4252(2003)01-0095-05
修稿时间:2002年7月31日

Study on pre- treatment process of ideal insulated metal substrates
ZHU Ji-man,LIU Yu-dong,MA Ju-sheng.Study on pre- treatment process of ideal insulated metal substrates[J].Journal of Functional Materials and Devices,2003,9(1):95-99.
Authors:ZHU Ji-man  LIU Yu-dong  MA Ju-sheng
Abstract:An anodization process was used to produce an insulating layer of anodic film for ideal Insulated Metal Substrates (IMS). Electronic Speckle Pattern Interferometry was utilized to measurethe cracking temperature of anodic films in thermal shock experiments. The effect of pre-treatment process of aluminum plates on the thermal shock resistivity of anodic films was studied, and Scanning Electron Microscope (SEM) was used to observe where cracks originated. The analysis indicates thatthe unevenness of Al surface before anodization could cause the formation of a kind of interface where the porosity is higher in the anodic film, and cracks are easy to generate at the interfaces during theprocess of thermal shock.
Keywords:insulated metal substrate  aluminum  anodic film  thermal shock resistivity
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