| 0.22 THz折叠波导慢波结构微细WEDM加工技术 |
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| 引用本文： | 刘 俊,周亚军,戴晶怡,向 伟,王亚军,陈 虎.0.22 THz折叠波导慢波结构微细WEDM加工技术[J].太赫兹科学与电子信息学报,2014,12(3):330-333. |
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| 作者姓名： | 刘 俊 周亚军 戴晶怡 向 伟 王亚军 陈 虎 |
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| 作者单位： | Institute of Electronic Engineering，China Academy of Engineering Physics，Manyang Sichuan 621999，China;Institute of Electronic Engineering，China Academy of Engineering Physics，Manyang Sichuan 621999，China;Institute of Electronic Engineering，China Academy of Engineering Physics，Manyang Sichuan 621999，China;Institute of Electronic Engineering，China Academy of Engineering Physics，Manyang Sichuan 621999，China;Institute of Electronic Engineering，China Academy of Engineering Physics，Manyang Sichuan 621999，China;Institute of Electronic Engineering，China Academy of Engineering Physics，Manyang Sichuan 621999，China |
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| 基金项目： | 中国工程物理研究院超精密加工技术重点实验室资助项目 (2012CJMZZ00007) |
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| 摘 要： | 0.22 THz 折叠波导慢波结构具有尺寸小，刚度低，精确度与表面光洁度要求高，结构复杂的特点。若采用微数控铣削加工方式，加工产生的应力易造成零件变形。微细电火花线切割加工技术为无刚性电蚀加工，非常适合慢波结构的微细加工。本文从微能脉冲电源、微细电极丝、表面质量、表面残余应力等方面，介绍了0.22 THz 折叠波导慢波结构微电火花线切割加工技术，实践证明：采用微电火花线切割加工工艺加工出的0.22 THz 折叠波导慢波结构，经测试满足了设计要求。
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| 关 键 词： | 折叠波导慢波结构 微细电火花线切割 表面质量 表面残余应力 |
| 收稿时间： | 2013/9/17 0:00:00 |
| 修稿时间： | 2014/3/13 0:00:00 |
Micro-WEDM technology of 0.22 THz folded waveguide slow wave structure |
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| LIU Jun,ZHOU Ya-jun,DAI Jing-yi,XIANG Wei,WANG Ya-jun and CHEN Hu.Micro-WEDM technology of 0.22 THz folded waveguide slow wave structure[J].Journal of Terahertz Science and Electronic Information Technology,2014,12(3):330-333. |
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| Authors: | LIU Jun ZHOU Ya-jun DAI Jing-yi XIANG Wei WANG Ya-jun and CHEN Hu |
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| Affiliation: | (Institute of Electronic Engineering, China Academy of Engineering Physics, Manyang Sichuan 621999, China) |
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| Abstract: | The conventional mechanical processing couldn’t be used in the manufacturing process of 0.22 THz folded waveguide slow wave structure due to its small-scale and low stiffness characteristics. The Micro-Wire cut Electrical Discharge Machining（WEDM） technology suits to the processing of such structure since the macro force between the electrode and workpiece is small in Micro-WEDM processing. The related issues of Micro-WEDM technology in fabricating the 0.22 THz folded waveguide slow wave structure are discussed, including pulse generator with micro energy, micro-electrode, surface quality and residual stress. The practice test indicates that the manufactured 0.22 THz folded waveguide slow wave structure by using Micro-WEDM technology can meet its design requirements. |
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| Keywords: | folded waveguide slow wave structure Micro-Wire cut Electrical Discharge Machining surface quality residual stress |
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