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Compound semiconductor research at the University of Washington in Seattle,Washington
Abstract:
The electronic materials program at the University of Washington is a research collaboration involving three departments: Chemical Engineering, Electrical Engineering, and Materials Science and Engineering. The program addresses current important issues in three areas: superlattices and artificially structured materials, epitaxial deposition of electronic materials on dissimilar substrates, and use of surface chemistry and atomic layer growth to achieve epitaxial deposition at reduced temperatures. A key enabling technology for these research areas is the development and use of non-invasive process monitoring and real-time control. Research in these areas is leading to new concepts in materials processing and epitaxial growth technologies for the semiconductor industry.
Keywords:
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