| 脉冲真空弧源沉积类金刚石薄膜耐磨特性研究 |
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| 引用本文： | 徐禄祥,冷永祥,孙永春,龚发梅,张琦,杨萍,黄楠.脉冲真空弧源沉积类金刚石薄膜耐磨特性研究[J].真空科学与技术学报,2004,24(5):363-366,371. |
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| 作者姓名： | 徐禄祥 冷永祥 孙永春 龚发梅 张琦 杨萍 黄楠 |
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| 作者单位： | 西南交通大学材料工程学院,生物材料与表面工程研究所,四川成都,610031 |
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| 摘 要： | 本文利用脉冲真空弧源沉积技术在Cr17Ni14Cu4不锈钢和Si(100)基体上制备了类金刚石(DLC)薄膜,研究在不同基体偏压下,DLC薄膜的结构与性能.采用拉曼光谱和X射线光电子能谱(XPS)研究DLC薄膜的原子结合状态,利用CSEM销盘摩擦磨损试验机研究其耐磨性,利用HXD1000B显微硬度仪测试其显微硬度,并采用压痕法评价其结合力.研究结果表明:DLC薄膜与基体结合牢固.随着基体偏压的提高,DLC薄膜内sp3键含量增大,薄膜硬度提高.Cr17Ni14Cu4不锈钢表面沉积DLC薄膜后,耐磨性大幅度提高,本文探讨了DLC薄膜的耐磨机理.
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| 关 键 词： | 类金刚石 耐磨性 脉冲真空弧源沉积 拉曼光谱 X射线光电子能谱 |
| 文章编号： | 1672-7126(2004)05-0363-04 |
Tribological Properties Investigation of Diamond-like Carbon Films Synthesized by Pulsed Arc Plasma Deposition in Vacuum |
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| Xu Luxiang,Leng Yongxiang,Sun Yongchun,Gong Famei,Zhang Qi,Yang Ping and Huang Nan.Tribological Properties Investigation of Diamond-like Carbon Films Synthesized by Pulsed Arc Plasma Deposition in Vacuum[J].JOurnal of Vacuum Science and Technology,2004,24(5):363-366,371. |
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| Authors: | Xu Luxiang Leng Yongxiang Sun Yongchun Gong Famei Zhang Qi Yang Ping and Huang Nan |
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| Affiliation: | Xu Luxiang,Leng Yongxiang,Sun Yongchun,Gong Famei,Zhang Qi,Yang Ping and Huang Nan * |
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| Abstract: | Diamond-like carbon (DLC) films were grown on Cr17Ni14Cu4 stainless steel and Si(111) substrates by pulsed arc plasma deposition in vacuum.Its structures and tribological property were studied with Raman spectroscopy and X-ray photoelectron spectroscopy (XPS).The results show that the adhesion at the interface of DLC film and Cr17Ni14Cu4 stainless steel is very strong and that as the substrates bias voltage increases,the number of sp 3 bond in the film increases,but the effective micro-hardness increases but slowly.Possible mechanism responsible for the increase of wear resistance of DLC coated Cr17Ni14Cu4 stainless steel are also tentatively discussed. |
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| Keywords: | Diamond-like carbon Wear resistance Pulsed vacuum arc plasma deposition Raman spectroscopy X-ray photoelectron spectra |
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