| 亚半微米光刻投影物镜温度补偿控制及算法研究 |
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| 引用本文： | 张津 姚汉民. 亚半微米光刻投影物镜温度补偿控制及算法研究[J]. 微细加工技术, 1999, 0(2): 71-78 |
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| 作者姓名： | 张津 姚汉民 |
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| 作者单位： | 中国科学院光电技术研究所 |
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| 摘 要： | 主要介绍一种光刻机投影物镜温度补偿控制的原理及控制算法。根据系统结构、对象特性和过程指标要求，采用了一种智能型线性－模糊控制器，获得了优良的动态和稳态性能。
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| 关 键 词： | 投影物镜；温度补偿；模糊控制；最优控制；智能型线性－模糊控制器；模拟仿真 |
CONTROL AND ALGORITHM INVESTIGATION ON TEMPERATURE COMPENSATION OF SUB MICRON PROJECTION LITHOGRAPHY OBJECTIVE |
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| Zhang Jin Yao Hanmin Cheng Xunan Tang Xiaoping. CONTROL AND ALGORITHM INVESTIGATION ON TEMPERATURE COMPENSATION OF SUB MICRON PROJECTION LITHOGRAPHY OBJECTIVE[J]. Microfabrication Technology, 1999, 0(2): 71-78 |
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| Authors: | Zhang Jin Yao Hanmin Cheng Xunan Tang Xiaoping |
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| Abstract: | The principle and control algorithm of temperature compensation for Sub Micron projection lithography objectives are introduced. Akind of intelligent linear fuzzy controller is developed according to the system structure and object's dynamic feature and the targets of processing. The excellent dynamic and stationary features are gained. |
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| Keywords: | Projection objectives Temperature compensation Fuzzy control Optimum control Intelligent linear fuzzy controller Simulation |
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