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Flexible Electronics: Highly Manufacturable Deep (Sub‐Millimeter) Etching Enabled High Aspect Ratio Complex Geometry Lego‐Like Silicon Electronics (Small 16/2017) |
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| Authors: | Mohamed Tarek Ghoneim Muhammad Mustafa Hussain |
| Affiliation: | Integrated Nanotechnology Lab and Integrated Disruptive Electronic Applications (IDEA) Lab, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia |
| Abstract: | |
| Keywords: | deep reactive ion etching flexible electronics silicon electronics soft/hard mask microfabrication |