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Effect of Substrate Bias on Microstructure and Properties of Tetrahedral Amorphous Carbon Films |
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| Authors: | Jiaqi ZHU Jiecai HAN Songhe MENG Qiang LI Manlin TAN |
| Abstract: | The microstructure and properties of tetrahedral amorphous carbon (ta-C) films deposited by the filtered cathodic vacuum arc technology has been investigated by visible Raman spectroscopy, AFM and Nano-indentor. The Raman spectra have been fitted with a s |
| Keywords: | Tetrahedral amorphous carbon |
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