| 纳米硅薄膜用于非晶硅液晶光阁阻光层研究 |
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| 引用本文： | 韩伟强,韩高荣,丁子上.纳米硅薄膜用于非晶硅液晶光阁阻光层研究[J].浙江大学学报(自然科学版 ),1995(6). |
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| 作者姓名： | 韩伟强 韩高荣 丁子上 |
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| 作者单位： | 浙江大学材料系 |
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| 摘 要： | 本文报告了我们首先提出的采用ａ－Ｓｉ：Ｈ／ｎｃ－Ｓｉ：Ｈ异质结作为大屏幕投影液晶光阀光敏层，向列型液晶作为液晶光阀调制层的一种新型液晶光阀．Ａ－Ｓｉ：Ｈ光导层和ｎｃ－Ｓｉ：Ｈ阻光层通过辉光放电等离子体化学气相沉积法连续制得．本文研究了不同沉积条件下ｎｃ－Ｓｉ：Ｈ薄膜的结构和光电性质．Ａ－Ｓｉ：Ｈ和随之沉积的ｎｃ－Ｓｉ：Ｈ形成了ａ－Ｓｉ：Ｈ／ｎｃ－Ｓｉ：Ｈ异质结，本文还讨论了它的光电性质。采用ａ－Ｓｉ：Ｈ／ｎｃ－Ｓｉ：Ｈ异质结的液晶光阀可改进器件的许多性能．
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| 关 键 词： | 纳米硅 异质结 液晶光阀 |
Study on nc-Si: H film as light blocking layer for liquid crystal light valve |
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| Han Weiqiang, Han Gaorong, Ding Zishang.Study on nc-Si: H film as light blocking layer for liquid crystal light valve[J].Journal of Zhejiang University(Engineering Science),1995(6). |
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| Authors: | Han Weiqiang Han Gaorong Ding Zishang |
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| Abstract: | Liquid crystal jight valve (LCLV ) using a-Si: H/nc-Si: H helerojunclion as the photosensor andnematic liquid crystal as the modulator has been firstly presented for large screen projunctiondisplay. Nc-Si: H light blacking layer has been inserted for increasing the device gain. The a-Si:Hphotoconductor and nc-Si: H light blocking layer were prepared by a modifyied glow discharge CVDmethod. The optoelectronic and structure properties of a-Si: H/nc-Si: H heterojunction with yaringparameters have been studied. LCLV using a-Si: H/nc-Si: H heterojunction as photosensor has shownthst inserting of nc-Si: H light blocking layer can improve most aspects of device performance. |
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| Keywords: | nanocrystalline silicon heterojunction liquid crystal light valve |
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