| 脉冲电子束系统沉积高温超导薄膜研究 |
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| 引用本文： | 陈雷明,张燕,杜银霄,李广成,郭艳峰.脉冲电子束系统沉积高温超导薄膜研究[J].重庆科技学院学报(自然科学版),2010,12(1):98-100. |
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| 作者姓名： | 陈雷明 张燕 杜银霄 李广成 郭艳峰 |
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| 作者单位： | 郑州航空工业管理学院,郑州,450015;中国科学院物理研究所北京凝聚态物理国家重点实验室,北京,100080 |
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| 基金项目： | 国家自然科学基金面上项目(60571029);;河南省教育厅自然科学基础研究计划项目(2008A140013);;河南省科技攻关计划项目(092102210166) |
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| 摘 要： | 高温超导薄膜生长是研究超导现象和超导器件的基础,一直是凝聚态物理研究的一个重要课题。各种各样的薄膜生长方法都被应用于高温超导薄膜的生长研究。采用一种崭新的薄膜沉积设备——脉冲电子束沉积系统(PED)成功制备出了NCCO、LSCO高温超导薄膜,并通过优化沉积参数,获得了具有良好表面形貌和超导转变特性的高温超导薄膜。
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| 关 键 词： | 脉冲电子束系统 超导薄膜 靶材 |
High Temperature Superconducting Film of Pulsed Electron Beam Deposition System |
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| CHEN Lei-ming ZHANG Yan DU Yin-xiao LI Guang-cheng GUO Yan-feng.High Temperature Superconducting Film of Pulsed Electron Beam Deposition System[J].Journal of Chongqing University of Science and Technology:Natural Science Edition,2010,12(1):98-100. |
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| Authors: | CHEN Lei-ming ZHANG Yan DU Yin-xiao LI Guang-cheng GUO Yan-feng |
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| Affiliation: | 1.Zhengzhou Institute of Aeronautical Industry Management;Zhengzhou 450015;2.Beijing National Laboratory for Condensed Matter Physics;Institute of Physics Chinese Academy of Sciences;Beijing 100080 |
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| Abstract: | High temperature superconducting film growth is the basis of superconducting phenomenon and superconducting devices,and it is the important subject of condensed matter physics research.Various growth methods of the film are used in growth research of high temperature superconducting film.With the new method pulsed electron beam deposition(PED) system,it produced the NCCO and LCSO high temperature superconducting film.Therefore,it also past the optimization deposition parameters and got the high temperature ... |
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| Keywords: | pulsed electron beam deposition superconducting film target material |
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