基于新型局域电化学沉积技术的MOEMS微结构制备方法

提出了一种基于新型微电极且沉积过程可自动控制的局域电化学沉积技术, 实现了高纵横比的铜微结构的制备。将新型微电极作为阳极固定在微步进电机上, 铜片作为阴极固定在电解液池底, 电解液池中装有0.5 M/L硫酸铜配比0.38 M/L硫酸的电解液。用观察电阻值的方法调整好初始间隙后, 在两电极间加一偏压, 用控制程序控制微步进电机匀速运动, 使微电极与阴极之间的微小间隙基本保持不变, 沉积生长铜微柱。铜微柱的纵横比可达7.2∶1, 直径可小至120 μm。实验结果表明, 该技术设备简单、易操作, 可实现三维微结构高效率、低成本的制备, 进一步研究必将在微光机电系统（MOEMS）及其它微纳系统领域得到广泛应用。

MOEMS 3D Microstructure Preparation Method Based on Novel Localized Electrochemical Deposition

Licalized electrochemical deposition technology is investigated based on a novel type of microelectrode and automatic control technique. The novel microelectrode is fixed on the microstepper motor. The speed of the stepper motor can be controlled. When the rate keeps the same as the deposition rate, the small gap between the microelectrode and the cathode will be able to basically remain unchanged. In this research, mixed electrolyte of 0.5 M/L CuSO4 and 0.38 M/L H2SO4 is selected. Cu micro column with high aspect ratio can be successfully deposited on Cu cathode from the plating solution. The aspect ratio can be greater than 7.2∶1. Micro column in diameter can be less than 120 μm. The experimental results indicate that this method can fabricate microstructures with low cost and high efficiency. It is expected that this new method will serve micro-opto-electro-mechanical systems and other micro/nano-structure preparation effectively.