| 无阀压电微流体泵工作特性与结构参数 |
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| 引用本文： | 鲁立君,吴健康.无阀压电微流体泵工作特性与结构参数[J].机械工程学报,2008,44(11). |
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| 作者姓名： | 鲁立君 吴健康 |
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| 作者单位： | 1. 华中科技大学土木工程与力学学院,武汉,430074
2. 武汉光电国家实验室,武汉,430074 |
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| 基金项目： | 国家自然科学基金资助项目
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| 摘 要： | 根据平面无阀压电微流体泵的结构特点,采用厚度平均的浅水模型和有限元法,得到微流体泵液体-振动片耦合方程.耦合方程的模态分析给出硅片一阶模态自然频率和振型,以及硅片振幅-频率关系.在模态分析之后,加入压电力考察振动片响应、微泵流动特征和微泵流量.同时研究微泵结构参数(微泵压电片半径、扩散管长度、最小宽度、扩散张角)对微流体泵液-固耦合系统的自然频率、振动片振幅和微泵流量的影响,得出对微流体泵优化设计有重要意义的结果.
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| 关 键 词： | 压电微流体泵 浅水方程模型 液体-振动片耦合方程 |
Working Behavior and Structure Parameter of Valveless Piezoelectric Micropumps |
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| LU Lijun,WU Jiankang.Working Behavior and Structure Parameter of Valveless Piezoelectric Micropumps[J].Chinese Journal of Mechanical Engineering,2008,44(11). |
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| Authors: | LU Lijun WU Jiankang |
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| Affiliation: | 1.School of Civil Engineering & Mechanics;Huazhong University of Science and Technology;Wuhan 430074;2.Wuhan National Laboratory for Optoelectronics;Wuhan 430074 |
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| Abstract: | Based on the characteristic of planar valveless piezoelectric micropumps thickness-averaged shallow water model and finite element method are employed to develop a liquid-diaphragm coupled equation of the micropump.The mode analysis of coupled equation is carried out for the first-order natural frequency,vibration shape and the amplitude-frequency relation of the silicon diaphram.After mode analysis,piezoelectric force is imposed to investigate diaphragm response,flow behavior and flow rate of micropump.The... |
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| Keywords: | Piezoelectric micropumps Shallow water equation model Liquid-diaphragm coupled equation |
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