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Investigation of high power laser coatings
作者姓名:SHAO Jian-da  FAN Zheng-xiu
作者单位:R&D Center for Optical Thin Film Coating Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
摘    要:1Introduction Opticalthinfilmcoatingisoneofthewea kestopticsinICFlasersystems.Totally,there aretwoaspectswhichinfluencethedevelopment ofthelasersystems.Thefirstaspectislaser damageresistanceofthecoatings,whichpuzzled coatingengineersformanyyears1].Although muchgreatprogresshasbeenmadeintheoretical analysisofdamagemechanismsandoptimization ofdepositionprocedures,therewerestillmany sealedproblemsrestrictingthefurtherimprove mentofthelaserinduceddamagethreshold(LIDT)27].Thelaser induceddama…

关 键 词:激光涂覆技术  LIDT  吸收能力  激光器
收稿时间:2005-06-06
修稿时间:2005-06-16

Investigation of high power laser coatings
SHAO Jian-da,FAN Zheng-xiu.Investigation of high power laser coatings[J].Optics and Precision Engineering,2005,13(4):471-479.
Authors:SHAO Jian-da  FAN Zheng-xiu
Affiliation:R&D Center for Optical Thin Film Coating Technology,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China
Abstract:High laser-induced damage threshold and large aperture were focuses on the studies of high power laser coatings. This paper reports the research activities at our center. Several measures were developed for evaluating characters of laser damage, including determination of laser induced damage threshold and detection of absorption based on surface thermal lensing technique. Defect was deemed to be the initial source of laser damage, and was the main factor restricting the laser damage resistance of optical coatings. The contribution of several kinds of typical defects to laser damage was analyzed, and some deposition measures were adopted to control and eliminate the origin of defect. Furthermore, some post-treatment methods were also employed to alleviate the influence of the defect and to improve the laser damage resistance. Correction mask was introduced to improve the thickness uniformity, and the thickness uniformity can be amended to less than 1% in the range of Φ650 mm. Preliminary investigation related to surface deformation was also conducted.
Keywords:high power laser coating  laser induced damage threshold (LIDT)  defect  thickness uniformity  oxygen-plasma post-treatment  large aperture  surface deformation
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