| 半导体材料电阻率与导电类型测试仪的研制 |
| |
| 引用本文： | 王琨,晏敏,黄会雄,侯志春,李旭,刘滔.半导体材料电阻率与导电类型测试仪的研制[J].国外电子测量技术,2008,27(9). |
| |
| 作者姓名： | 王琨 晏敏 黄会雄 侯志春 李旭 刘滔 |
| |
| 作者单位： | 1. 湖南大学物理与微电子学院,长沙,410082
2. 湖南商务职业技术学院,长沙,410205 |
| |
| 基金项目： | 国家级大学生创新性实验计划 |
| |
| 摘 要： | 采用一种新的双电测组合法测试半导体材料的方块电阻和体电阻率,改进了传统直流四探针测试法。以凌阳SPCE061A单片机为控制核心,通过软件设计和硬件电路相结合,设计了一款集半导体导电类型判别与方块电阻、电阻率测量于一体的测试仪。运用冗余通道法、PID算法,提高了系统的测量精度和智能化水平。实际运行结果表明:测量结果与探针间距无关;能自动修正边界影响和自动选择量程,较好地满足了生产与教学需要。
|
| 关 键 词： | 双电测组合法 方块电阻 电阻率 导电类型 SPCE061A |
Development of semiconductor material resistivity and conductivity type tester |
| |
| Wang Kun,Yan Min,Huang Huixiong,Hou Zhichun,Li Xu,Liu Tao.Development of semiconductor material resistivity and conductivity type tester[J].Foreign Electronic Measurement Technology,2008,27(9). |
| |
| Authors: | Wang Kun Yan Min Huang Huixiong Hou Zhichun Li Xu Liu Tao |
| |
| Affiliation: | Wang Kun Yan Min Hou Zhichun Li Xu Liu Tao College of Physics and Micro Electron,Hunan University,Changsha 410082 Huang Huixiong Hunan Vocational College of Commerce,Changsha 410205 |
| |
| Abstract: | A new two-sounding combination of semiconductor materials testing sheet resistance and resistivity,Improved the traditional four-probe test.Using Sunplus SPCE061A as the control core,combining software design and hardware designed a set of testing equipment to judging the conductivity type,sheet resistance and resistivity of semiconductor. Using redundant channel,PID algorithm improved the measurement accuracy and intelligent level.Actual operating re- suits show:the measurement results have nothing to do with the probe space,can automatically correct boundary effects and automatically choice range,can meet the needs of production and teaching better. |
| |
| Keywords: | double electrical measurement combination sheet resistance resistivity conductivity type SPCE061A |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
