线振动MEMS陀螺结构振动非线性特性研究

针对一种线振动微机电系统(MEMS)陀螺结构的振动非线性开展研究,利用理论方法推导、有限元仿真和扫频数据拟合得到了陀螺结构的非线性系数,根据达芬方程推导计算出非线性迟滞效应消失的临界激励以及对应的振幅阈值,为陀螺结构设计提供了理论指导.实验结果表明:非线性迟滞效应消失点和理论值相吻合.

Study on vibrating nonlinearity chracteristics of line-vibration MEMS gyroscope structure

Vibrating nonlinearity of line-vibration micro-electro-mechanical system(MEMS)gyroscope structure is studied.Nonlinear coefficient of gyro structure are determined by theoretical derivation,finite elelment modeling (FEM)and sweeping-frequency data fitting.The critical excitation as well as corresponding threshold of amplitude required for the disappearance of nonlinear hysteresis effect is solved with reference to the Duffing equation,which provides theoretical guidance for the structure design of the gyroscope.Experimental results demonstrate that the disappearance point of the nonlinear hysteresis effect agrees well with the theoretical value.