多元高k氧化物材料的研究进展

近年来,多元高k氧化物材料一直是高k材料研究的热点.从材料结构以及物理性能研究方面对多元高k氧化物如多元稀土氧化物、多元过渡金属氧化物、稀土氧化物一过渡金属化合物的最新研究进行了总结.并对高k材料中最有应用潜力的氮氧化物和叠层栅的物理性能和研究状况进行了评述.

Progress in Research of Multi-component High-k Oxide Materials

Multi-component oxides are always the focus of high k material research in the recent years.The material structure and physical properties of multi-component high k oxides,such as multi-component rare earth oxides,multi-component transition metal oxides and the compounds of rare earth and transition metal oxide,have been summarized.The physical properties and research progress of the most prospective high k nitride oxides and dielectric stacks have also been reviewed.