| 复合CrCO-Ti保护薄膜的热稳定性研究 |
| |
| 引用本文： | 胡作启. 复合CrCO-Ti保护薄膜的热稳定性研究[J]. 真空电子技术, 2007, 0(4): 87-90 |
| |
| 作者姓名： | 胡作启 |
| |
| 作者单位： | 华中科技大学电子科学与技术系,湖北,武汉,430074 |
| |
| 摘 要： | 用非平衡脉冲直流磁控溅射技术制备出了复合CrCO-Ti和CrCO保护薄膜,在氮气气氛条件下,研究了这些薄膜的结构、粘合力、耐磨性等随退火温度的变化规律和掺Ti对其性能的影响.得出结论:沉积的薄膜是非晶态薄膜,这些薄膜的耐磨能力达到10-8mm3/Nm;掺Ti能增强薄膜的柔韧性和负载能力,但在400℃及以上退火条件下,薄膜的结构、粘合力、耐磨能力等开始变化,而OEM为40%的复合CrCO-Ti薄膜具有较好的热稳定性.
|
| 关 键 词： | 硬薄膜 复合薄膜 氧化物 热稳定性 |
| 文章编号： | 1002-8935(2007)04-0087-04 |
| 修稿时间： | 2007-07-16 |
Thermal Stability of Composite CrCO-Ti Protective Thin Films |
| |
| HU Zuo-qi. Thermal Stability of Composite CrCO-Ti Protective Thin Films[J]. Vacuum Electronics, 2007, 0(4): 87-90 |
| |
| Authors: | HU Zuo-qi |
| |
| Abstract: | Composite CrCO and CrCO-Ti protective thin films were fabricated by unbalanced pulsed DC magnetron sputtering technique(UBM).We studied the influences of their structures,adhesion,wear resistance and doping Ti on their thermal stability.It is concluded that all as-deposited protective thin films are amorphous-like.These thin films have excellent wear rate at an order of magnitude as high as 10-8 mm3/Nm.Doping Ti can improve their ductility and load capacity.But,thin films' structure,adhesion and wear resistance start to change while composite coating with OEM 40% has better thermal stability. |
| |
| Keywords: | Hard coating Composite thin films Oxide Thermal stability |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
