MEMS tunable SOI waveguide Bragg grating filter with 1.3 THz tuning range for C-band 100 GHz DWDM optical network

A MEMS tunable integrated waveguide Bragg grating-based filter for C-band optical dense wavelength-division multiplexing (DWDM) network is presented and analyzed in this work. Waveguide Bragg grating being a notch filter in the transmission spectrum is used to realize a tunable filter by varying the applied voltages to the fixed–fixed beam loaded with this grating. The strain across the grating is enhanced by choosing MEMS beam configuration such that the metal electrode is the bottom-most layer of the composite fixed–fixed beam. Device dimensions are chosen to achieve a narrow full width half maximum of 0.77 nm, allowing filtering of adjacent channels of 100 GHz DWDM network. A large Bragg wavelength shift of 10.4 nm (1552.52–1562.92 nm) was achieved at 45.8 V actuation providing tuning for 14 DWDM channels with inter-channel cross talk below ? 21 dB, with tuning range of 1.3 THz.