表面三维微观形貌检测技术及其发展

从表面特征衡量的角度阐述三维参数评定的客观性及合理性，强调三维微观形貌测量的重要民生。介绍当前表面三维微观形貌检测的多种测量方法及其特点，并阐述该测量技术的发展及趋势，提出表面形貌检测应从简单过程检测的角度扩展到完成工艺优化角色的思想。

Surface 3D Micro Topography Measurement Technology and Its Devolopment

This paper presents the objectivity and rationality of three-dimensional parameter assessment from the point of surface feature judgement, and ulteriorly emphasizes the importance of 3D micro topography measurement. Afterwards, several measuring methods and their characteristics of present surface 3D micro topography measurement technique are introduces. Through expressing the development and trend of this technique, this paper presents the idea that the surface topography measurement should extend the process detecting to the process optimization.