镁掺杂对ZnO薄膜光诱导亲水性的影响

采用溶胶-凝胶法在Si(111)制备了一系列Mg掺杂的ZnO薄膜。用X射线衍射仪、原子力显微镜和接触角测试仪测量薄膜的微结构、表面形貌和表面接触角。结果表明：Mg掺杂ZnO薄膜仍为六角纤锌矿型结构，所有薄膜均具有较好的c轴择优取向。随着Mg掺杂含量的增加，薄膜的粗超度从2.14nm增大到9.56nm，薄膜表面接触角由89? 减小到 82?。通过对薄膜交替进行紫外光照和黑暗放置(或热处理)，可以实现其表面疏水与超亲水性之间的可逆转化，光诱导可逆转化效率随Mg掺杂含量的增加而增大。

Effect of magnesium doping on the light-induced hydrophilicity of ZnO thin films

Undoped and Mg-doped ZnO thin films were deposited on Si (111) and quartz substrates by using the sol-gel method. Microstructure, surface topography and water contact angle of the thin films have been measured by X-ray diffraction (XRD), an atomic force microscope (AFM) and water contact angle apparatus, respectively. The XRD results show that all the thin films are polycrystalline with a hexagonal structure and have a preferred orientation along the c-axis perpendicular to the substrate. With the increase of Mg concentration, the RMS roughness increases from 2.14 to 9.56 nm and the contact angle of the un-irradiated thin films decreases from 89° to 82°. The wetting behavior of the resulting films can be reversibly switched from hydrophobic to hydrophilic, through alternation of UV illumination and dark storage. The light-induced efficiency of the thin films increases with the increase of Mg concentration.