Low-loss InGaAsP/InP submicron optical waveguides fabricated by ICP etching |
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| Authors: | Dupont S Beaurain A Miska P Zegaoui M Vilcot J-P Li HW Constant M Decoster D Chazelas J |
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| Affiliation: | Inst. d'Electronique, Univ. des Sci. et Technol. de Lille, Villeneuve d'Ascq, France; |
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| Abstract: | The fabrication and characterisation of low-loss InGaAsP/InP optical submicron waveguides made with ICP etching is reported. Their width ranges from 0.2 to 2 /spl mu/m. For the 0.5 /spl mu/m width, the propagation losses at /spl lambda/=1.55 /spl mu/m as low as 4.2 dB/mm have been measured. |
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