| 具有SiO2/SiNX/SiO2 复合绝缘层的有机薄膜晶体管 |
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| 引用本文： | 刘向,刘惠.具有SiO2/SiNX/SiO2 复合绝缘层的有机薄膜晶体管[J].半导体学报,2011,32(3):034003-3. |
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| 作者姓名： | 刘向 刘惠 |
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| 作者单位： | School of Materials Science and Engineering;Dalian Jiaotong University;School of Electronic and Information Engineering;Dalian University of Technology; |
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| 基金项目： | Project supported by the Projects of Liaoning Province,China(No.2007220040); the National Natural Science Foundation of China (No.60477014) |
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| 摘 要： | We have investigated a SiO_2/SiN_x/SiO_2 composite insulation layer structured gate dielectric for an organic thin film transistor(OTFT) with the purpose of improving the performance of the SiO_2 gate insulator. The SiO_2/SiN_x/SiO_2 composite insulation layer was prepared by magnetron sputtering.Compared with the same thickness of a SiO_2 insulation layer device,the SiO_2/SiN_x/SiO_2 composite insulation layer is an effective method of fabricating OTFT with improved electric characteristics and decrease...
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| 关 键 词： | 有机薄膜晶体管 复合绝缘层 载流子迁移率 |
| 修稿时间： | 10/8/2010 4:11:13 PM |
Organic thin film transistors with a SiO2/SiNx/SiO2 composite insulator layer |
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| Liu Xiang and Liu Hui.Organic thin film transistors with a SiO2/SiNx/SiO2 composite insulator layer[J].Chinese Journal of Semiconductors,2011,32(3):034003-3. |
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| Authors: | Liu Xiang and Liu Hui |
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| Affiliation: | Liu Xiang~1 and Liu Hui~2,1 School of Materials Science and Engineering,Dalian Jiaotong University,Dalian 116028,China 2 School of Electronic and Information Engineering,Dalian University of Technology,Dalian 116024,China |
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| Abstract: | We have investigated a SiO_2/SiN_x/SiO_2 composite insulation layer structured gate dielectric for an organic thin film transistor(OTFT) with the purpose of improving the performance of the SiO_2 gate insulator. The SiO_2/SiN_x/SiO_2 composite insulation layer was prepared by magnetron sputtering.Compared with the same thickness of a SiO_2 insulation layer device,the SiO_2/SiN_x/SiO_2 composite insulation layer is an effective method of fabricating OTFT with improved electric characteristics and decreased l... |
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| Keywords: | organic thin film transistor composite insulation layer carrier mobility |
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