用于平板显示LTPS制备的ELA光束整形系统

介绍了多晶硅薄膜较非晶硅薄膜在平板显示领域的优势以及准分子激光晶化制备多晶硅膜的结晶过程。介绍了透镜阵列实现匀光的原理。阐述了典型的准分子激光退火线型光束整形系统的扩束、匀光、投影等结构。并介绍了连续横向固化技术在准分子激光制备低温多晶硅领域的应用。讨论了准分子激光退火光学系统的发展现状,指出了其在平板显示行业的重要意义。

ELA-beam shaping systems for flat panel display prepared by LTPS

The advantages to poly silicon film instead of amorphous silicon film in the field of flat panel display were introduced .Crystallization process of poly silicon film by using excimer laser crystallization system was studied .The principle of how lens array achieve the uniformity of output laser energy density was described .The structure of typical excimer laser annealing(ELA) line beam shaping system, which included beam expanding unit , beam energy homogenizing unit , projection unit and so on was focused on .Finally the application of sequential lateral solidification technology in the area of low temperature poly silicon ( LTPS ) using excimer laser nnealing was introduced .The status of ELA optical system was discussed and its significance in flat panel display industry was pointed out .