世界半导体设备的“十大”发展趋势

讨论了世界半导体设备的“十大”发展趋势,如设备与工艺互动化、设备加工晶圆大尺寸化、加工晶圆单片化、组合化、高精度化、全自动化、制造商垄断化、高价格化、研制联合化和用户化。

The "Ten Major" Developmental Trend of the World Semiconductor Equipment

The "Ten Major" developmental trend of the world semiconductor equipment are discussed, such as the equipment with the technology relate each other , the equipment process large size wafer, the equipment process single wafer, the equipment combination, the equipment high precision, the equipment all automation, the equipment manufacturer monopolize, the equipment high price, the equipment manufacture unite and the equipment relate user.