功率IGBT模块测试设备脉冲高压参数校准技术研究

为了避免器件温升对参数测量造成影响,"脉冲测试法"被广泛应用于功率IGBT模块的静态和动态参数测试中。该类设备内部单脉冲高压源脉冲宽度为50μs时脉冲的高压幅度可达7 k V以上,如何对该单脉冲高压源进行校准是一个技术难题。研制了脉冲高电压分压器,并使用数据采集单元搭建了脉冲高压参数校准装置,解决了功率IGBT模块测试设备的脉冲高压参数校准难题。通过测量不确定分析和实验验证,综合考虑各测量不确定度分量的影响,在包含因子k为2时,脉冲高压参数校准扩展测量不确定度为1.4%。

Research on calibration for the single high pulse voltage source in the parameters test equipment of power IGBT modules

The pulse test method is widely used in the static and dynamic parameters test of the power IGBT modules in order to avoid the influence of component temperature rise on the parameter measurements.Now, how to calibrate the single high pulse voltage source is a difficult problem because the amplitude of the single high voltage source reaches 7 kV with the pulse width 50 μs.In this paper, the high pulse voltage calibration device is established by means of data acquisition unit and the high pulse voltage divider to solve the big problem of calibrating the single high pulse voltage source in test equipment of power IGBT modules.Finally, on the consideration of the influence of all the uncertainties components, the uncertainty of the measurement to calibrate the single high pulse voltage source is 1.4％ with the coverage factor k as 2.