直接驱动XY平台的零相位自适应鲁棒控制

为了提高直接驱动XY平台的跟踪性能,提出了将零相位误差跟踪控制器(ZPETC)与自适应鲁棒控制器(ARC)相结合的控制策略对跟踪误差进行控制,并且采用基于时间序列预测技术的轮廓误差实时补偿方法对两轴运动进行协调控制.ZPETC作为前馈跟踪控制器,可以有效提高系统带宽及跟踪性能,使位置能够无静差地跟踪二阶指令输入;ARC能够克服系统参数变化、负载扰动等不确定性,增强系统的稳定性与鲁棒性;采用基于时间序列预测技术的轮廓误差实时补偿方法能够动态控制插补过程,以有效减小轮廓误差.仿真结果表明,所提出的控制方案具有良好的跟踪性和鲁棒性,可以有效提高跟踪精度和轮廓精度.

Zero phase adaptive robust control of direct drive XY table

In order to improve the tracking performance of direct drive XY table, the tracking error was controlled with the strategy in combination of both zero phase error tracking controller （ZPETC） and adaptive robust controller （ARC）, and the movement of two axes was coordinated and controlled with the contour error real time compensation method based on the time series prediction technology. As the feedforward tracking controller, ZPETC can effectively improve the system bandwidth and tracking performance, which can make the position track the second order command input without the static error. The ARC can overcome such uncertainties as system parameter change and load disturbance, and enhance the stability and robustness of system. The contour error real time compensation method based on the time sequence prediction technology can dynamically control the interpolation process in order to effectively reduce the contour error. The simulated results show that the proposed control scheme has good tracking ability and robustness, and can greatly improve the tracking and contour accuracy.