Cf/SiC复合材料表面沉积铱膜层工艺研究

为了进一步提高Cf/SiC复合材料的高温耐烧蚀性能,采用冷壁MOCVD工艺,对条型和管型Cf/SiC复合材料样品进行了金属铱膜层沉积。结果表明,在该工艺条件下,Cf/SiC复合材料的力学性能没有明显降低,沉积的金属铱膜呈白亮的金属色光泽。针对通氧沉积工艺中涂层氧含量较多的问题,通过对涂层进行后处理,使金属铱层的纯度大大提高,为获得高纯膜提供了新的工艺途径。

Research on the Deposition of Ir Films on Cf/SiC Composites

In order to enhance the ablation resistance of Cf/SiC composites in high temperature, Ir films on banding and tubular specimen of Cf/SiC composites was made with metalic organic chamical vapour deposition process. The results indicate that after the deposition, the mechanical property of the specimen is not deteriorated and the deposited Ir films show metallic brightness. The excessive oxygen content in the films resulted from O2 flow during the deposition process is reduced remarkably with post treatment of purification, which provides a new approach to high-purity Ir films.