面向IC封装的两自由度高速精密定位系统

为弥补传统滚珠丝杠式两维驱动xy精密定位平台在速度和加速度提高上存在的不足,提出一种基于直线音圈电机直接驱动,采用新型弹性解耦机构的高速高精度xy定位平台.系统探讨了该装置的动态设计方法,在此基础上,加工生产出xy精密定位平台样机一套.通过对样机进行性能测试,结果表明,xy定位平台具有很高的速度、加速度和精度,能够适应当前IC封装业发展对高速高精度的要求.

2-DOF high-speed and high-precision positioning system for IC packaging

In order to overcome the limitation of speed and acceleration of the conventional two-dimensional drived xy precision positioning table with ball screw,a high-speed and high-precision xy positioning table based on voice coil actuator direct-drive,adopted novel flexible decoupling mechanism,was presented.Dynamic design method was discussed.Based on the above,a xy precision positioning table prototype was made.The results of the performance test indicate that the xy table prototype machine is of very high speed,acceleration and precision.And the xy table can meet the high-speed and highacceleration requirement of the modern development of IC packaging.