| 制作微器件的超声电解复合微细加工基础研究 |
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| 引用本文： | 朱永伟,吴冰杰,云乃彰.制作微器件的超声电解复合微细加工基础研究[J].电加工与模具,2006(2):56-59. |
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| 作者姓名： | 朱永伟 吴冰杰 云乃彰 |
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| 作者单位： | 1. 扬州大学机械工程学院,江苏扬州,250001;南京航空航天大学机电学院,江苏南京,210016
2. 南京航空航天大学机电学院,江苏南京,210016 |
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| 基金项目： | 王宽诚教育基金;江苏省高校自然科学基金 |
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| 摘 要： | 提出一种制造MEMS微器件的新技术——超声电解复合微细加工；设计微细加工工艺系统，进行一系列微细加工基础工艺试验，验证超声电解复合微细加工在微器件制造中的可行性．展示了该技术在提高微细加工精度、效率、表面质量等方面的优势，研究成果对完善MEMS器件制作技术具有重要理论意义与实用价值。
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| 关 键 词： | 超声加工 电解加工 复合微细加工 MEMS器件 试验研究 |
| 收稿时间： | 2005-11-08 |
| 修稿时间： | 2005年11月8日 |
The Basic Study on the Combined Technology of Ultrasonic and Electrochemical Machining for Manufacturing Micro-instruments |
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| Zhu Yongwei,Wu Bingjie,Yun Naizhang.The Basic Study on the Combined Technology of Ultrasonic and Electrochemical Machining for Manufacturing Micro-instruments[J].Electromachining & Mould,2006(2):56-59. |
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| Authors: | Zhu Yongwei Wu Bingjie Yun Naizhang |
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| Affiliation: | 1. Yangzhou University, Yangzhou 225001, China; 2. Nanjing University of Aeronautics and Astronautics, Nanjing 210016,China |
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| Abstract: | A new technology is presented of ultrasonic and electrochemical machining for manufacturing micro-instruments.The micro-machining system of the combined technology is built.A series of micro-machining basic tests are carried for manufacturing MEMS(micro electro-mechanical system) instruments.The possibility and advantages on machining precision,productivity and surface quality of the technology has been proved.The study work is helpful for the manufacturing of MEMS instruments. |
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| Keywords: | ultrasonic machining electrochemical machining combined micro-machining MEMS instruments test study |
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