| 光纤气体传感器的研究 |
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| 引用本文： | 阎卫平,刘文琦,牛德芳,汤素芬.光纤气体传感器的研究[J].传感技术学报,1998,11(3):22-25. |
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| 作者姓名： | 阎卫平 刘文琦 牛德芳 汤素芬 |
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| 作者单位： | 大连理工大学电子系!116023 |
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| 摘 要： | 介绍了一种强度调制型光纤气体传感器，它采用光通信用多模光纤，利用ＩＣ工艺中的光刻和化学腐蚀等技术，在硅片上出传感器的整体结构，这种传感器的结构简单，测量方便，重复性好，成本低，有深入研究的价值。
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| 关 键 词： | 光纤气体传感器 强度调制 吸收 传感器 |
the Research of Optical Fibre Gas Sensor |
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| Yan Weiping Liu Wenqi Niu Defang.the Research of Optical Fibre Gas Sensor[J].Journal of Transduction Technology,1998,11(3):22-25. |
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| Authors: | Yan Weiping Liu Wenqi Niu Defang |
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| Abstract: | This paper describes a kind of intensity-modulated optical-fibre gas sensor. Theen-block construction of the sensor is made on a piece of silicon chip by photoecthing pro-cess and chemical corrision of IC technique with multimode optical fibre which is oftenused in optical communication. This kind of gas sensor has simple construction, good sen-sivity and repeatability, low cost, and it is easy to use. Because of this, it is worthy offurther research. |
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| Keywords: | optical fibre gas sensor intensity-modulated absorption |
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