| F-P干涉仪在长度测量领域的应用 |
| |
| 引用本文： | 程晓辉,赵洋,李达成.F-P干涉仪在长度测量领域的应用[J].激光技术,1999,23(3):134-137. |
| |
| 作者姓名： | 程晓辉 赵洋 李达成 |
| |
| 作者单位： | 1.清华大学精密测试技术及仪器国家重点实验室, 北京, 100084 |
| |
| 摘 要： | F-P标准具和干涉仪利用多光束干涉的原理,产生极锐的干涉条纹并且谐振频率对F-P腔长的变化非常敏感,根据这些特点,从利用F-P干涉仪进行激光器的频率锁定、稳频,光学倍程精密定位和纳米测量三个角度综述了在长度测量领域F-P干涉仪的发展情况;在分析主要存在的问题和解决方法的基础上,讨论了F-P干涉仪的发展方向,并指出在纳米测量中F-P干涉仪将起到越来越重要的作用。
|
| 关 键 词： | F-P干涉仪 稳频 光学倍程 纳米测量 多光束干涉 |
| 收稿时间： | 1998-07-20 |
| 修稿时间： | 1998-09-21 |
Applications of Fabry-Perot interferometer in length measurement |
| |
| Cheng Xiaohui,Zhao Yang,Li Dacheng.Applications of Fabry-Perot interferometer in length measurement[J].Laser Technology,1999,23(3):134-137. |
| |
| Authors: | Cheng Xiaohui Zhao Yang Li Dacheng |
| |
| Abstract: | Etalon or Fabry Perot interferometer (FPI) based on multi beam interference principle can generate very narrow fringe and is sensitive to cavity length change. In this paper, three kinds of applications in length measurement of Etalon and FPI are reviewed: frequency locking and stabilization of lasers, precision positioning using optical multiplier and applications in nanometrology. The obstacle and the solutions in using FPI are also presented and the trend of FPI is given next. At last the possibility and importance of FPI in nanometrology is specially emphasized. |
| |
| Keywords: | Fabry Perot interferometry frequency stabilization optical multiplier nanometrology multi-beam interference |
| 本文献已被 维普 万方数据 等数据库收录！ |
| 点击此处可从《激光技术》浏览原始摘要信息 |
|
点击此处可从《激光技术》下载全文 |
|
