| CMO S电容式湿度传感器的测量电路分析与仿真 |
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| 引用本文： | 王阳,陈军宁,柯导明,徐超.CMO S电容式湿度传感器的测量电路分析与仿真[J].传感器与微系统,2005,24(12):40-42. |
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| 作者姓名： | 王阳 陈军宁 柯导明 徐超 |
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| 作者单位： | 1. 安徽大学,电子系,安徽,合肥,230039;浙江万里学院,电信学院,浙江,宁波,315100
2. 安徽大学,电子系,安徽,合肥,230039 |
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| 基金项目： | 国家863计划资助项目（2002AA404010） |
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| 摘 要： | 对与CMOS工艺兼容的电容式湿度传感器的测量电路进行了分析和仿真,为后期的湿度传感器流片成功提供了有效的保证。该湿度传感器系采用梳状铝电极结构,聚酰亚胺作为感湿介质。比较不同的测量方法,得出最优的测量电路。对测量电路进行理论推导后,对其进行模拟,得出了输出电压与相对湿度的关系图。最后,对该湿度传感器进行版图设计,并分析其后加工工艺。
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| 关 键 词： | 湿度传感器 电容 测量电路 失配 |
| 文章编号： | 1000-9787(2005)12-0040-03 |
| 收稿时间： | 06 21 2005 12:00AM |
| 修稿时间： | 2005年6月21日 |
Analysis & simulation of CMOS capacitive humidity sensor measuring circuit |
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| WANG Yang,CHEN Jun-ning,KE Dao-ming,XU Chao.Analysis & simulation of CMOS capacitive humidity sensor measuring circuit[J].Transducer and Microsystem Technology,2005,24(12):40-42. |
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| Authors: | WANG Yang CHEN Jun-ning KE Dao-ming XU Chao |
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| Affiliation: | 1. Dept of Elct, Anhui University, Hefei 230039, China; 2. Dept of Elct, Zhejiang Wanli University, Ningbo 315100, China |
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| Abstract: | Measuring eircuct of a capacitive humidity sensor compatible with CMOS technology is analyzed and simulated,as will guarantee a successful tape out of humidity sensor. It uses comb electrodes and polyimide as moisture sensing material. After comparison of different~ measuring means of humidity sensor, an optimized measuring circuit has been put forward. The measuring circuits are theoretically deduced. The measuring circuit is simulated. Relation pattern of output voltage and relative humidity are got. Finally, the layout of this humidity sensor is designed and its post-processing technology is analyzed. |
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| Keywords: | humidity sensor capacitance measuring circuit mismatching |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
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