LED 晶圆贴片过程中压力的二阶段模糊决策与控制

针对LED 晶圆贴片过程, 设计一种利用阀门的开关和开度控制气缸内气压的压力控制系统, 提出一种多目标分阶段决策和控制的方法, 实现活塞运动和加压控制. 根据活塞的位移和压力, 采用逻辑决策方法, 选择需要控制的阀门. 根据规划压力与实测压力的差值及其差值变化率, 利用模糊自适应PID 控制方法控制阀门的开度. 采用半张量积的方法将逻辑决策和模糊控制中的推理转变成矩阵形式, 以简化运算量, 提高运算速度和控制精确度.

Two-step decision and control of pressure in LED wafer pasting process

A pressure control system is designed to control the pressure inside the cylinder via the valve’s switching and opening degree in the LED wafer pasting process. The method of multi-target and multi-step decision and control is proposed, which can control the piston’s motion and pressure. According to the displacement and pressure on the piston, the logic decision method is used to select the valve that needs to be controlled. According to the error and error change rate between planned and actual measured pressure, the fuzzy adaptive PID control method can be used to purposeful control valve’s opening degree. By using the method of semi-tensor product, fuzzy reasoning can be transformed into a matrix form, which can greatly simplify the computation, and improve the calculation speed and the control precision.