高选择性常温NH_3传感器

采用MEMS技术,如KOH腐蚀、光刻、溅射金属等技术,在硅片、玻璃等材料上制得平面式微传感器管芯,此结构具有微型化、低功耗、一致性好、适宜大批量生产的优点。敏感材料的采用不同于传统无机物,而是以苯胺为原料,合成高分子聚合物———聚苯胺,此敏感材料不需要加热源,其电阻在室温下与NH3浓度成一定函数关系,可以测得空气中较低含量的NH3。聚苯胺的另一个显著优点是高选择性,实验表明,高达1000×10-6(气体体积分数)的H2,CH4,CO,C4H10,C2H5OH的灵敏度远低于50×10-6(NH3气体体积分数)的灵敏度。

Normal temperature ammonia sensor with high selectivity

Applying technology of MEMS(microelectronic mechanical system),such as KOH etching,photoetch,sputtering metal,etc.micro plane sensor is fabricated on silicon or glass.This kind of sensor has advantage of miniaturization,low power consumption,unanimity and production in batches.This sensing material is different to traditional inorganic one and it takes aniline for material to combine high polymers-poly-aniline.It has no need of any heating source,and its resistance has a functional relationship with the concentration of ammonia in room (temperature.)It can detect low content of ammonia in air.Another important merit of the element is excellent (selectivity.)In the high concentration of1*#000×10~(-6) ofH_2,*#CH_4,*#CO,*#C_4H_(10)*#,C_2H_5OH,the sensitivities are much smaller than that of 50×10~(-6)(volume fraction)ammonia gas in clean air.