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金属基复合透明导电膜的研究
引用本文:贾芳,乔学亮,陈建国,李世涛,邱小林,吴长乐. 金属基复合透明导电膜的研究[J]. 稀有金属, 2006, 30(4): 505-510
作者姓名:贾芳  乔学亮  陈建国  李世涛  邱小林  吴长乐
作者单位:1. 华中科技大学模具技术国家重点实验室,湖北,武汉,430074
2. 华中科技大学模具技术国家重点实验室,湖北,武汉,430074;南昌理工学院纳米材料研究中心,江西,南昌,330013
基金项目:华中科技大学校科研和教改项目
摘    要:
透明导电薄膜作为一种新型的光电材料显示出多种优异的光电性能和具有广泛的应用背景。综述了金属基复合透明导电膜的发展历程与研究现状,重点讨论了电介质,金属,电介质(D/M/D)和透明导电氧化物,金属,透明导电氧化物(TCO/M/TCO)这两种类型的多层复合膜,分析了其设计原理和存在问题,并指出了控制金属层的厚度和界面扩散是制备高性能光电薄膜的重要方面,最后介绍了金属基复合膜应用,并对其研究进行了展望。

关 键 词:薄膜  透明导电氧化物  电介质  金属基复合  设计原理
文章编号:0258-7076(2006)04-0505-06
收稿时间:2005-11-07
修稿时间:2005-11-072005-12-15

Research on Metal-Based Compound Transparent Conducting Multilayer Films
Jia Fang,Qiao Xueliang,Chen Jianguo,Li Shitao,Qiu Xiaolin,Wu Changle. Research on Metal-Based Compound Transparent Conducting Multilayer Films[J]. Chinese Journal of Rare Metals, 2006, 30(4): 505-510
Authors:Jia Fang  Qiao Xueliang  Chen Jianguo  Li Shitao  Qiu Xiaolin  Wu Changle
Abstract:
Transparent conducting film shows various excellent optical and electrical properties and abroad applied background as a new kind of photoelectrical materials.Its tendency of development and research situation were recited and two types of multilayer films which were dielectric/metal/dielectric(D/M/D) and transparent conducting oxide/metal/transparent conducting oxide(TCO/M/TCO) were mainly discussed.The principle of design and existing problems were analyzed,and it was considered that there were two important aspects of fabricating excellent photoelectrical thin film which were controlling the thickness of metal and diffusing of interface.Moreover,the application of multilayer films was presented and the foreground of development was viewed.
Keywords:thin film   transparent conducting oxide   dielectric   metal-based compound   design theory
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