A review of the theory and technology for ohmic contacts to group III–V compound semiconductors

The technology for ohmic contacts to group III–V compound semiconductors is reviewed in this paper. The basic principles of current transport in metal-semiconductor (Schottky barrier) contacts are presented first. The modes of current transport considered are thermionic emission over the barrier, and tunneling through the barrier due to thermionic-field or field emission. Special attention is devoted to the parameters of temperature and doping concentration which determine the dominant mode of conduction. As the primary mode of conduction changes from thermionic emission dominated to tunneling dominated, the current-voltage behavior of the contact changes from rectifying to ohmic in character. The experimental techniques for fabricating ohmic contacts to III–V compound semiconductors are then described. Contact problems as they pertain to specific device applications are considered. Finally, present difficulties with contacts to mixed III–V crystals are discussed.