A small scale Z-pinch device as an intense soft X-ray source

A small scale (400 J) device to study the application of radiation emitted by a plasma Z-pinch to microscopy and microlithography has been built. As a pulsed emitter of soft X-rays the Z-pinch is an inexpensive source for high resolution flash microscopy of thin films, and live and unstained biological specimens. In the repetitive mode, radiation from the device was used to expose resists for microlithography. Windows of different plastics shielded the resists from debris and allowed exposure of resists in air. The use of different pinching gases allowed tunability of radiation.