A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip |
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| Authors: | Carballo VMB Chefdeville M Fransen M van der Graaf H Melai J Salm C Schmitz J Timmermans J |
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| Affiliation: | Inst. for Nanotechnol., Univ. of Twente, Enschede; |
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| Abstract: | An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. This letter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing. Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3D radiation tracks on the spot. |
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