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| 智能化涡流薄膜厚度测量的研究 | |
| 引用本文： | 周仲浩,秦志伟. 智能化涡流薄膜厚度测量的研究[J]. 真空与低温, 1997, 3(1): 5-8 |
| 作者姓名： | 周仲浩 秦志伟 |
| 作者单位： | 华南理工大学电子与通信工程系 |
| 摘 要： | 叙述了智能化涡流薄膜厚度测量系统的组成、原理及控制关系，分析了保证测量不确定度很小的措施。指出了采用涡流测量薄膜厚度也是一种实用的测量方法。 |
| 关 键 词： | 涡流 薄膜 智能化 |
THE RESEARCH OF THIN FILM THICKNESS MEASUREMENT BY INTELLIGENT EDDY |
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| Zhou Zhonghao Qin Zhiwei Huang Guangzhou. THE RESEARCH OF THIN FILM THICKNESS MEASUREMENT BY INTELLIGENT EDDY[J]. Vacuum and Cryogenics, 1997, 3(1): 5-8 | |
| Authors: | Zhou Zhonghao Qin Zhiwei Huang Guangzhou |
| Abstract: | In this paper,the composition, principle and control relation of the intelligent eddy measurement system of the thin film thickness are discribed,and the measures of precision are analyzed. It is indicated that the thin film thickness measurement by eddy is also a practical method. |
| Keywords: | Eddy Thin film Intelligent. |
| 本文献已被 CNKI 维普 等数据库收录！ | |