Theoretical study on SAW characteristics of layered structuresincluding a diamond layer |
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Authors: | Nakahata H Hachigo A Higaki K Fujii S Shikata S Fujimori N |
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Affiliation: | Res. Labs., Sumitomo Electr. Ind. Ltd., Itami; |
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Abstract: | Diamond has the highest surface acoustic wave (SAW) velocity among all materials and thus can provide much advantage for fabrication of high frequency SAW devices when it is combined with a piezoelectric thin film. Basic SAW properties of layered structures consisting of a piezoelectric material layer, a diamond layer and a substrate were examined by theoretical calculation. Rayleigh mode SAW's with large SAW velocities up to 12,000 m/s and large electro-mechanical coupling coefficients from 1 to 11% were found to propagate in ZnO/diamond/Si, LiNbO3/diamond/Si and LiTaO3/diamond/Si structures. It was also found that a SiO2/ZnO/diamond/Si structure can realize a zero temperature coefficient of frequency with a high phase velocity of 8,000-9,000 m/s and a large electro-mechanical coupling coefficient of up to 4% |
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